Inventors:
Glenn A. Gados - Camarillo CA
Matthew Coe - Simi Valley CA
Assignee:
Sci-Tech Glassblowing, Inc. - Moorpark CA
International Classification:
B05C 1302
Abstract:
A quartz carrier having spaced, parallel grooved rods for holding a batch of semi-conductor wafers edgewise in upstanding, spaced, parallel relation is formed with a pair of flat end plates supporting the ends of the rods. The ends of the end plates extend laterally outwardly of the rods and support a pair of inverted âUâ-shaped carrier support members extending along the length of the carrier. A tool having an carrier engaging rod mounted to a handle allows the user to insert the carrier engaging rod into one of the carrier support members to support the weight of the carrier. A rod mounted to the handle extends beyond the length of the wafer supporting grooved rods and engages the ends of the end plates to limit the rotation of the carrier about the carrier support member, enabling the user to raise and manipulate the carrier by means of the handle.