US Patent:
20190027896, Jan 24, 2019
Inventors:
- Shenzhen, CN
Hongmin Chen - Santa Clara CA, US
Hongbing Lei - Santa Clara CA, US
Xiao Andy Shen - Santa Clara CA, US
International Classification:
H01S 5/06
H01S 5/125
H01S 5/343
Abstract:
A wavelength tunable laser includes: a heating layer, a dielectric layer, reflectors, a transport layer, a support layer, and a substrate layer. The heating layer is located above the transport layer; the transport layer is located above the support layer, and the transport layer includes an upper cladding layer, a waveguide layer, and a lower cladding layer from top to bottom; the reflector is located in the transport layer; the support layer has a protection structure, where the protection structure forms a hollow structure together with the transport layer and the substrate layer, and the hollow structure has a support structure; and the substrate layer is located below the support layer. The heating layer, the reflector, and a part of the transport layer form a suspended structure to prevent heat dissipation. Thus thermal tuning efficiency can be improved, and power consumption can be lowered.