Inventors:
Jairo Terra Moura - Marlboro MA, US
Martin Hosek - Lowell MA, US
Todd Bottomley - Chesterfield NH, US
Ulysses Gilchrist - Reading MA, US
Assignee:
Brooks Automation, Inc. - Chelmsford MA
International Classification:
H01L 21/68
US Classification:
414783, 414217, 414936, 414941
Abstract:
In accordance to an exemplary embodiment of the disclosed embodiments, a substrate aligner apparatus is presented, the substrate aligner apparatus having a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus, an inverted chuck capable of holding the substrate and movably connected to the frame by a chuck driveshaft engaged to the inverted chuck for moving the inverted chuck relative to the frame and effecting alignment of the substrate, a sensing device located between the chuck and chuck driveshaft for detecting a position determining feature of the substrate, and a substrate transfer mechanism movably connected to the frame and located inside the frame below the inverted chuck for moving the substrate from the inverted chuck to the substrate transporter.