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Terry M Bluck

from San Jose, CA
Age ~65
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Also known as:
Terry Michel Bluck, Terrence Michelle Bluck, Terrence M Bluck, Terrence M Block, Terry K
Related to:
Steve Rosen, 63Jacob Rosen, 34Rachel Fabbio, 48Rebecca A Rosen, 67Mitchell Rosen, 33Grant Rosen, 30
Connected to:
Susan B Bluck, 64Robert W Blucke, 95Bonnie N Bludworth, 43Abraham Blue, 87Alex Blue, 53Autumn T Blue, 35Beth A Blue, 56Bonnie Blue, 75Bonny L Blue, 66Brandon Blue, 41

Terry Bluck Phones & Addresses

  • San Jose, CA
  • Monterey, CA
  • Truckee, CA
  • Sunnyvale, CA
  • 3128 Butte St, Santa Clara, CA 95051 (408) 246-2214
  • Novato, CA
  • 3128 Butte St, Santa Clara, CA 95051

Work

Company: Intevac 2014 Position: Chief technical officer

Education

Degree: Bachelors, Bachelor of Science School / High School: San Jose State University Specialities: Physics

Languages

English

Interests

Exercise • Home Improvement • Reading • Gourmet Cooking • Sports • Food • Home Decoration • Health • Cooking • Gardening • Outdoors • Electronics • Crafts • Fitness • Music • Dogs • Movies • Collecting • Medicine • Travel • Boating • Investing • Traveling

Industries

Semiconductors

Resumes

Resumes

Terry Bluck Photo 1

Chief Technical Officer

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Location:
3128 Butte St, Santa Clara, CA 95051
Industry:
Semiconductors
Work:
Intevac
Chief Technical Officer
Photon Dynamics Nov 2002 - Aug 2004
Vice President Engineering
Education:
San Jose State University
Bachelors, Bachelor of Science, Physics
Interests:
Exercise
Home Improvement
Reading
Gourmet Cooking
Sports
Food
Home Decoration
Health
Cooking
Gardening
Outdoors
Electronics
Crafts
Fitness
Music
Dogs
Movies
Collecting
Medicine
Travel
Boating
Investing
Traveling
Languages:
English

Publications

Us Patents

Plasma Processing System And Method

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US Patent:
6368678, Apr 9, 2002
Filed:
Feb 1, 2000
Appl. No.:
09/495548
Inventors:
Terry Bluck - Santa Clara CA, 95051
James H. Rogers - Milpitas CA, 95035
International Classification:
H05H 124
US Classification:
427569, 427571, 427577, 118723 MP, 118723 HC, 118723 E
Abstract:
A substrate processing system includes a processing chamber, an electrically floating substrate holder positioned in the chamber, a gas source for supplying a process gas to the chamber, at least one ion source located in the chamber, and a power source for energizing the ion source by positively biasing the anode and negatively biasing the cathode in a train of pulses of selectably variable duty cycle and magnitude to maintain a selected time averaged current, the bias in each instance being relative to the chamber. The ion source ionizes the process gas producing ions for processing a substrate disposed on the floating substrate holder in the chamber. The floating substrate is biased in accord with the net charge thereon as controlled by the energetic electron flux. One embodiment includes two such ion sources. In this case, the power source energizes the first and second anodes and the cathodes in a time multiplexed manner, such that only one of the first or second ion sources is energized at any time and interactions between ion sources are eliminated.

Substrate Processing System

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US Patent:
6517691, Feb 11, 2003
Filed:
May 1, 2000
Appl. No.:
09/562039
Inventors:
Terry Bluck - Santa Clara CA
John Les Hughes - Rodeo CA
Eric C. Lawson - Sunnyvale CA
Tatsuru Tanaka - Campbell CA
Assignee:
Intevac, Inc. - Santa Clara CA
International Classification:
C23C 1434
US Classification:
20429825, 118719, 20429835, 156345, 414217, 414221, 41422207, 41422209, 41422212, 41422213, 41422501, 41422302, 41422605, 414938
Abstract:
A substrate processing system includes a primary processing assembly and secondary processing assembly. The secondary processing assembly has one or more interconnected modules and includes one or more process stations. The primary and secondary processing assemblies are connected by a vacuum conveyor, so that the substrates remain in vacuum during transport. The secondary processing assembly may include one or more modules which are interconnected to provide a desired system configuration. A dual processing module, including first and second process stations, is selectably operable in a serial mode or a parallel mode.

Evaporative System For Solar Cell Fabrication

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US Patent:
8087380, Jan 3, 2012
Filed:
Oct 30, 2009
Appl. No.:
12/610187
Inventors:
Terry Bluck - Santa Clara CA, US
Michael S. Barnes - San Ramon CA, US
Kevin P. Fairbairn - Los Gatos CA, US
Assignee:
Intevac, Inc. - Santa Clara CA
International Classification:
C23C 14/34
US Classification:
118723VE, 438679, 438908
Abstract:
A plurality of chamber are arranged about a transport chamber. The linear transport chamber may include a linear track supporting robot arms. The robot arms transport substrates to and from the chambers. Each chamber includes a plurality of evaporators, each controlled independently. Each substrate positioned in the chamber is coated from a plurality of the evaporators, such that by controlling the operation of each evaporator independently the formation of the layers and the concentration gradient of each layer can be precisely controlled.

Method Of And Apparatus Utilizing Carbon Cord For Evaporation Of Metals

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US Patent:
8114339, Feb 14, 2012
Filed:
Feb 24, 2010
Appl. No.:
12/712043
Inventors:
Arthur C. Wall - Morgan Hill CA, US
Terry Bluck - Santa Clara CA, US
Assignee:
Intevac, Inc. - Santa Clara CA
International Classification:
F27B 14/10
F27B 14/14
US Classification:
266275, 432262
Abstract:
A high temperature evaporator is made using an electrically insulating crucible and a heating element made of woven graphite fibers. The crucible is manufactured out of an electrically insulating block to the required shape, and channels are machined on the walls of the crucible. The woven graphite cord is threaded through the channels and is used as heating elements. Since the heating cords are made of woven graphite, they are very flexible and do not embrittle. They can be manufactured to various resistivity as needed, allowing for relatively inexpensive power supplies and low current power delivery. The cords are not fragile and do not break due to thermal shock or vibration.

Apparatus And Methods For Transporting And Processing Substrates

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US Patent:
8293066, Oct 23, 2012
Filed:
Dec 1, 2008
Appl. No.:
12/325993
Inventors:
Terry Bluck - Santa Clara CA, US
Kevin P. Fairbairn - Los Gatos CA, US
Michael S. Barnes - San Ramon CA, US
Christopher T. Lane - Los Gatos CA, US
Assignee:
Brooks Automation, Inc. - Chelmsford MA
International Classification:
C23F 1/00
H01L 21/306
H01L 21/677
C23C 16/00
C23C 14/00
US Classification:
15634532, 15634531, 118719, 20429825, 20429835, 4142171, 414935, 414941
Abstract:
There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A key element is the use of a transport chamber along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers and then out of the controlled atmosphere following processing in the processing chambers.

Apparatus And Methods For Transporting And Processing Substrates

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US Patent:
8303764, Nov 6, 2012
Filed:
Mar 7, 2011
Appl. No.:
13/042407
Inventors:
Terry Bluck - Santa Clara CA, US
Kevin P. Fairbairn - Los Gatos CA, US
Michael S. Barnes - San Ramon CA, US
Christopher T. Lane - Los Gatos CA, US
Assignee:
Brooks Automation, Inc. - Chelmsford MA
International Classification:
C23F 1/00
H01L 21/306
H01L 21/677
C23C 16/00
C23C 14/00
US Classification:
15634532, 15634531, 118719, 20429825, 20429835, 4142171, 414935, 414941
Abstract:
There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A key element is the use of a transport chamber along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers and then out of the controlled atmosphere following processing in the processing chambers.

System And Method For Commercial Fabrication Of Patterned Media

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US Patent:
8349196, Jan 8, 2013
Filed:
Dec 5, 2008
Appl. No.:
12/329462
Inventors:
Kevin P. Fairbairn - Los Gatos CA, US
Michael S. Barnes - San Ramon CA, US
Terry Bluck - Santa Clara CA, US
Ren Xu - San Jose CA, US
Charles Liu - Los Altos CA, US
Ralph Kerns - San Carlos CA, US
Assignee:
Intevac, Inc. - Santa Clara CA
International Classification:
B44C 1/22
US Classification:
216 22, 216 37, 216 39
Abstract:
A system is provided for etching patterned media disks for hard drive. The modular system may be tailored to perform specific processes sequences so that a patterned media disk is fabricated without removing the disk from vacuum environment. In some sequence the magnetic stack is etched while in other the etch is performed prior to forming the magnetic stack. In a further sequence ion implantation is used without etching steps. For etching a movable non-contact electrode is utilized to perform sputter etch. The cathode moves to near contact distance to, but not contacting, the substrate so as to couple RF energy to the disk. The substrate is held vertically in a carrier and both sides are etched serially. That is, one side is etched in one chamber and then in the next chamber the second side is etched.

Method For Optimized Removal Of Wafer From Electrostatic Chuck

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US Patent:
8363378, Jan 29, 2013
Filed:
Feb 17, 2009
Appl. No.:
12/372664
Inventors:
Terry Bluck - Santa Clara CA, US
Hizam Sahibudeen - Woodlands, SG
Dennis Grimard - Ann Arbor MI, US
Assignee:
Intevac, Inc. - Santa Clara CA
International Classification:
H01T 23/00
US Classification:
361234
Abstract:
Systems and methods for optimally dechucking a wafer from an electrostatic chuck are described. The force on a lift-pin mechanism is monitored and a dechuck voltage is determined based on the force. The wafer is dechucked at the determined dechuck voltage.
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Terry M Bluck from San Jose, CA, age ~65 Get Report