Resumes
Resumes
Telly Koffas Phones & Addresses
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1394 Beattie Ct, San Jose, CA 95120 (408) 429-9068
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81 152Nd Ave, Beaverton, OR 97006
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16372 Estuary Dr, Beaverton, OR 97006 (503) 617-6089
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536 Civic Dr, Walnut Creek, CA 94597 (925) 287-9865
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Berkeley, CA
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Downey, CA
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Los Angeles, CA
Publications
Us Patents
Wafer Level Alignment Structures Using Subwavelength Grating Polarizers
View pageUS Patent:
20090002706, Jan 1, 2009
Filed:
Jun 26, 2007
Appl. No.:
11/823107
Inventors:
Martin Weiss - Portland OR, US
Brian Kinnear - Hillsboro OR, US
Telly Koffas - Beaverton OR, US
David Fryer - Hillsboro OR, US
Ming-chuan Yang - Meridian ID, US
William T. Blanton - Hillsboro OR, US
Brian Kinnear - Hillsboro OR, US
Telly Koffas - Beaverton OR, US
David Fryer - Hillsboro OR, US
Ming-chuan Yang - Meridian ID, US
William T. Blanton - Hillsboro OR, US
International Classification:
G01J 4/00
US Classification:
356369
Abstract:
In one embodiment, a wafer alignment system, comprises a radiation source to generate radiation, a radiation directing assembly to direct at least a portion of the radiation onto a surface of a wafer, the radiation having a polarization state, an optical analyzer to collect at least a portion of the radiation reflected from the wafer, the wafer including at least a first region having a first grating pattern oriented in a first direction and at least a second region having a second grating pattern oriented in a second direction, different from the first direction.