US Patent:
20070090476, Apr 26, 2007
Inventors:
Michael Geis - Acton MA, US
Theodore Fedynyshyn - Sudbury MA, US
Sandra Deneault - Waltham MA, US
Keith Krohn - Chelmsford MA, US
Theodore Lyszczarz - Concord MA, US
Michael Marchant - N. Chelmsford MA, US
International Classification:
H01L 29/84
Abstract:
A surface-emission cathode formed on an insulating surface having cantilevered, i.e. “undercut,” electrodes. Suitable insulating surfaces include negative electron affinity (NEA) insulators such as glass or diamond. The cathode can operate in a comprised vacuum (e.g., 10Torr) with no bias on the electrodes and low vacuum electric fields (e.g., at least 10 V cm). Embodiments of the present invention are inexpensive to fabricate, requiring lithographic resolution of approximately 10 micrometers. These cathodes can be formed over large areas for use in lighting and displays and are suitable for satellite applications, such as cathodes for tethers, thrusters and space-charging neutralizers.
