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Ronald A Capodilupo

from Beverly, MA
Age ~66

Ronald Capodilupo Phones & Addresses

  • 40 Bertram St, Beverly, MA 01915 (978) 927-6816
  • Bridgton, ME
  • Peabody, MA

Work

Company: Axcelis technologies Position: Enquipment engineer

Industries

Semiconductors

Resumes

Resumes

Ronald Capodilupo Photo 1

Equipment Engineer

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Location:
40 Bertram St, Beverly, MA 01915
Industry:
Semiconductors
Work:
Axcelis Technologies
enquipment engineer

Publications

Us Patents

Ion Beam Monitoring In An Ion Implanter Using An Imaging Device

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US Patent:
7423277, Sep 9, 2008
Filed:
Mar 14, 2006
Appl. No.:
11/374945
Inventors:
Alexander S. Perel - Danvers MA, US
Phil J. Ring - Beverly MA, US
Ronald A. Capodilupo - Beverly MA, US
Michael A. Graf - Belmont MA, US
Assignee:
Axcelis Technologies, Inc. - Beverly MA
International Classification:
H01J 37/317
H01J 49/10
US Classification:
25049221, 25049223, 250396 R, 250398, 250423 R, 250424
Abstract:
An image monitor system monitors characteristics of an ion beam employed in ion implantation. The monitored characteristics can include particle count, particle information, beam current intensity, beam shape, and the like. The system includes one or more image sensors that capture frames or images along a beam path of an ion beam. An image analyzer analyzes the captured frames to obtain measured characteristics. A controller determines adjustments or corrections according to the measured characteristics and desired beam characteristics.

Toroidal Filament For Plasma Generation

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US Patent:
62045083, Mar 20, 2001
Filed:
Aug 7, 1998
Appl. No.:
9/130662
Inventors:
Jiong Chen - Beverly MA
Ronald A. Capodilupo - Beverly MA
Scott Barusso - Gloucester MA
Philip J. Ring - Beverly MA
Kui Jin - Beverly MA
Assignee:
Axcelis Technologies, Inc. - Beverly MA
International Classification:
H01J 37317
US Classification:
250423R
Abstract:
A filament (18) for an ion implanter ion source or plasma shower is provided comprising first and second legs (20a, 20b) and a thermally emissive central portion (40) having ends connected, respectively, to the first and second legs. Preferably, the legs (20a, 20b) are constructed from tantalum (Ta), and the thermally emissive portion (40) is constructed of tungsten (W). The thermally emissive portion is coiled substantially along the entire length thereof and formed in the shape of a generally closed loop, such as a toroid. The toroid is comprised of two toroid halves (40a, 40b) coiled in opposite directions. The toroid halves are constructed of a plurality of filament strands (42, 44, 46) twisted together along substantially the entire length thereof. The coils of the toroid are capable of establishing closed loop magnetic field lines (B) therein when electrical current flows through the thermally emissive portion. The closed loop magnetic field lines (B) confine electrons (E) emitted from the surface of the thermally emissive portion within the confines of the coils.
Ronald A Capodilupo from Beverly, MA, age ~66 Get Report