Inventors:
Andrew Yednak - Phoenix AZ, US
Phillip Rayer - Chandler AZ, US
International Classification:
B24B005/00
Abstract:
The present invention provides a labyrinth seal for use with a workpiece planarization apparatus, such as a chemical mechanical planarization apparatus. In accordance with one aspect of the invention, there is provided a labyrinth seal comprising a member having at least one sloped feature which is configured to inhibit a fluid from traveling into and through the labyrinth. In accordance with another aspect of the invention, there is provided a workpiece polishing apparatus including a rotary shaft assembly which comprises a housing having a plurality of interior components; a shaft extending longitudinally through the housing, wherein the shaft includes a first end connected to a motor for rotating the shaft relative to the housing; a platen connected to a second end of the shaft; and a labyrinth seal located in a space between the platen and the housing, wherein the labyrinth seal comprises a member having at least one sloped feature which is configured to inhibit a fluid from traveling into and through the labyrinth seal. In accordance with yet another aspect of the invention, there is provided a labyrinth seal having at least one sloped feature, wherein the labyrinth seal is coupled to a fluid purge system including a purge line connected to a source of pressurized fluid and terminating in the labyrinth seal.