Inventors:
James G. Shelnut - Northboro MA
David Merricks - Coventry, GB
Oleh B. Dutkewych - Chatham MA
Charles R. Shipley - Auburndale MA
Assignee:
Shipley Company, L.L.C. - Marlborough MA
International Classification:
C23C 2802
US Classification:
205102, 205123, 205191, 205291, 205916, 427 96, 427305, 427437, 4274431, 438622, 438627, 438678, 438687
Abstract:
Disclosed are methods for depositing a copper seed layer on a substrate having a conductive layer. Such methods are particularly suitable for depositing a copper seed layer on a substrate having small apertures, and preferably very small apertures.