US Patent:
20030077869, Apr 24, 2003
Inventors:
Keith Kamekona - Scottsdale AZ, US
James Morgan - Chandler AZ, US
Guy Averett - Mesa AZ, US
Misbahul Azam - Gilbert AZ, US
Weizhong Cai - Scottsdale AZ, US
Assignee:
Semiconductor Components Industries, LLC.
International Classification:
H01L021/331
H01L021/8222
Abstract:
A method of forming a semiconductor device () includes the step of exposing a first region () of a semiconductor substrate () with a photomask (). A material is implanted into the first region to form a compound that masks the first region of the semiconductor substrate to form an electrode () of the semiconductor device.