Inventors:
Kyle A. Woolrich - El Segundo CA, US
Jonathan M. Allison - Redondo Beach CA, US
Thomas Rust, III - Manhattan Beach CA, US
Robert E. Silhavy - Torrance CA, US
Assignee:
THE BOEING COMPANY - Chicago IL
International Classification:
H01L 23/46
H01L 21/50
H01L 27/02
Abstract:
A system includes a carrier defining a plurality of channels. The system includes an integrated circuit (IC) die having a first side and having a second side opposite the first side. The second side of the IC die is coupled to the carrier. The system includes a die attach layer between the carrier and the second side of the IC die. The die attach layer defines one or more openings that enable a fluid to flow from the carrier to the second side of the IC die.