Inventors:
Kulbir Singh Bhalla - Red Bank NJ
Albert Maxwell Gottlieb - Maplewood NJ
Assignee:
Lucent Technologies Inc. - Murray Hill NJ
International Classification:
G02B 2608
Abstract:
A microelectromechanical system in which, operationally independent of the movable element and the component for moving it, a microelectromechanical sensor senses the position of the movable element. The microelectromechanical sensor adjoins the movable element, at least in part, and may be a strain gage, or a gage of a capacitive, piezoelectric, piezoresistive, or pressure type, among others. The resulting signal is fed back to control the component for moving the movable element. In an array of movable elements and sensors, the signal of each sensor is specific to one movable element.