Inventors:
Joseph Michael Shaw - Cranbury NJ
Karl Heinz Zaininger - Princeton NJ
Assignee:
RCA Corporation - New York NY
International Classification:
H01L 21205
Abstract:
A method for making an apertured aluminum oxide substrate by selectively masking a sapphire wafer, depositing aluminum oxide adjacent the wafer and the mask, and removing the aluminum oxide deposited adjacent the mask and the mask, whereby an aperture is formed in the aluminum oxide. A composite is thus formed of an insulating substrate of monocrystalline sapphire with an insulating epitaxial layer of aluminum oxide apposed thereto, the epitaxial layer having an aperture therein which may be filled with an island of epitaxial silicon.