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Jurgen M Lobert

from Medway, MA
Age ~66
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Also known as:
Juergen M Lobert, Jugen Lobert
Phone and address:
21 Charles River Rd, Medway, MA 02053
Connected to:
Andrew C Lobert, 41Joseph Lobert, 30Marilyn W Lobert, 58Susan M Lobertini, 69Anthony J Lobes, 61Robert A Lobes, 76Michael A Lobevero, 68William C Lobger, 61Anthony L Lobianco, 88Dylan K Lobianco, 50

Jurgen Lobert Phones & Addresses

  • 21 Charles River Rd, Medway, MA 02053
  • 430 Franklin Village Dr, Franklin, MA 02038 (774) 571-7384
  • San Diego, CA
  • La Jolla, CA
  • Milford, MA
  • Boulder, CO

Work

Position: Clerical/White Collar

Education

Degree: Graduate or professional degree

Publications

Us Patents

Systems And Methods For Detecting Contaminants

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US Patent:
20050183490, Aug 25, 2005
Filed:
Dec 1, 2004
Appl. No.:
11/001669
Inventors:
Anatoly Grayfer - Newton MA, US
Jurgen Lobert - Franklin MA, US
William Goodwin - Medway MA, US
Frank Belanger - Webster MA, US
John Sergi - Franklin MA, US
Mark Phelps - Attleboro MA, US
International Classification:
G01N011/00
US Classification:
073023200
Abstract:
The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room and the dry traps. Tenax traps and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. When the sampling interval is done, the unit is sent to an analysis facility for processing.

Method And Apparatus For Improving Measuring Accuracy In Gas Monitoring Systems

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US Patent:
20060108221, May 25, 2006
Filed:
Nov 24, 2004
Appl. No.:
10/997043
Inventors:
William Goodwin - Medway MA, US
Mark Phelps - Attleboro MA, US
Jurgen Lobert - Franklin MA, US
Bruce Laquidara - Oakland MA, US
Anatoly Grayfer - Newton MA, US
International Classification:
G01N 27/26
US Classification:
204424000
Abstract:
A method and apparatus for improving measurement accuracy in a gas monitoring system is provided. The apparatus can be connected to a plurality of gas sample lines each containing a gas sample. The gas samples are routed through a number of delivery channels which are fewer in number than the plurality of sample lines. Each delivery channel is alternatively coupled to a detector which identifies contaminants present in the gas samples. Each delivery channel includes a voltage sensitive orifice (VSO). The VSO's are operated by a controller and provide gas samples at a constant flow and a constant pressure to the detector independent of the length of the gas sample line being measured.

Systems And Methods For Detecting Contaminants

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US Patent:
20050120775, Jun 9, 2005
Filed:
Sep 2, 2004
Appl. No.:
10/933692
Inventors:
Anatoly Grayfer - Newton MA, US
Jurgen Lobert - Franklin MA, US
William Goodwin - Medway MA, US
Frank Belanger - Webster MA, US
John Sergi - Franklin MA, US
Mark Phelps - Attleboro MA, US
Assignee:
Extraction Systems, Inc. - Franklin MA
International Classification:
G01N011/00
US Classification:
073028040
Abstract:
The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room and the dry traps. Tenax traps and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. When the sampling interval is done, the unit is sent to an analysis facility for processing.
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Jurgen M Lobert from Medway, MA, age ~66 Get Report