University of Maine System Board of Trustees - Bangor ME
International Classification:
H01L 41/07 H04R 17/00
US Classification:
310338, 310334, 310336, 310365, 310333
Abstract:
An acoustic wave sensor having a piezoelectric substrate shaped to generate lateral electric fields. The sensor has a pair of electrodes deposited upon a reference surface of the substrate. A sensing surface that is opposite from the reference surface is adapted to be immersed in an environment, such as a gas or a liquid.
A Monolithic Antenna Excited Acoustic Transduction (MAEAT) device is fabricated by photolithographically depositing a metallic antenna on one side of a piezoelectric crystal substrate.
Temperature Compensated Orientation Of Berlinite For Surface Acoustic Wave Devices
Bruce H. Chai - Bridgewater NJ Dana S. Bailey - Columbia MD John F. Vetelino - Veazie ME Donald L. Lee - Orono ME Jeffrey C. Andle - Bangor ME
Assignee:
Allied Corporation - Morris Township NJ
International Classification:
H01L 4108
US Classification:
310313A
Abstract:
A piezoelectric wafer of single crystal berlinite, having a surface defined by an X-axis boule cut at about 85. degree. , provides a improved substrate for a surface acoustic wave device. The 85. degree. cut angle is relatively easy to fabricate, provides excellent temperature compensation in a range form 20. degree. C. to 100. degree. C. , and has high piezoelectric coupling coefficient.
Temperature Compensated Orientations Of Berlinite For Surface Acoustic Wave Devices
Bruce H. Chai - Bridgewater NJ Dana S. Bailey - Columbia MD John F. Vetelino - Veazie ME Donald L. Lee - Orono ME Jeffrey C. Andle - Bangor ME
Assignee:
Allied Corporation - Morris Township, Morris County NJ
International Classification:
H01L 4108
US Classification:
310313A
Abstract:
A piezoelectric wafer of single crystal berlinite, having a surface defined by an X-axis boule cut at an angle in the range from about 94. degree. -104. degree. , provides an improved substrate for a surface acoustic wave device. These cut angles are relatively easy to fabricate, provide excellent temperature compensation in a range from -55. degree. C. to 125. degree. C. , and have high piezoelectric coupling coefficient.
Joshua J. Caron - Orono ME Reichl B. Haskell - Veazie ME Carl J. Freeman - Rockville MD John F. Vetelino - Orono ME
Assignee:
Sensor Research and Development Corp. - Orono ME
International Classification:
G01N 2900 G01N 2922 H01L 4108
US Classification:
73 2401
Abstract:
A surface acoustic wave (SAW) sensor system and associated method for accurately measuring mercury gas concentrations. The sensor includes a SAW device that may be a SAW delay-line oscillator or a SAW resonator. The surface of the piezoelectric substrate of the SAW device includes a material suitable for amalgamation with mercury. Mercury in the gaseous environment is captured with the amalgamating material so as to cause a change in the mechanical and electrical properties on the surface of the device, thereby causing a change in the frequency output of the device. The piezoelectric substrate of the SAW device is preferably coupled to a heater to permit control of the temperature at the surface of the device. The piezoelectric substrate temperature may be regulated to produce a substantial equilibrium of mercury amalgamation/desorption kinetics. Under the conditions provided by the invention, the mercury concentration in the gaseous environment can be determined.