Inventors:
Brian E. Stine - Los Altos Hills CA, US
Christopher Hess - San Ramon CA, US
John Kibarian - Los Altos Hills CA, US
Kimon Michaels - San Jose CA, US
Joseph C. Davis - Allen TX, US
Purnendu K. Mozumder - Plano TX, US
Sherry F. Lee - San Jose CA, US
Larg H. Weiland - San Ramon CA, US
Dennis J. Ciplickas - San Jose CA, US
David M. Stashower - Los Gatos CA, US
Assignee:
PDF Solutions, Inc. - San Jose CA
International Classification:
G06F017/50
G06F019/00
Abstract:
A yield for an integrated circuit is predicted by processing a wafer to have a portion fabricated with at least one layout attribute of the integrated circuit. The portion of the wafer is analyzed to determine an actual yield associated with the at least one layout attribute. A systematic yield associated with the at least one layout attribute is determined based on the actual yield and a predicted yield associated with the at least one layout attribute. The predicted yield assumes that random defects are the only yield loss mechanism. A yield of an actual or proprosed product layout is predicted for the integrated circuit based on the systematic yield.