Inventors:
Jaynal A. Molla - Gilbert AZ, US
John D'Urso - Chandler AZ, US
Kelly Kyler - Mesa AZ, US
Bradley N. Engel - Chandler AZ, US
Gregory W. Grynkewich - Gilbert AZ, US
Nicholas D. Rizzo - Gilbert AZ, US
Assignee:
Freescale Semiconductor, Inc. - Austin TX
International Classification:
H01L 21/302
US Classification:
438745, 216 18, 216 22, 216 38, 257108, 257295, 257414, 257421, 365157, 365158, 365171, 365173, 438 42, 438692, 438723, 438724, 438741, 438754
Abstract:
A method of fabricating a cladding region for use in MRAM devices includes the formation of a conductive bit line proximate to a magnetoresistive memory device. The conductive bit line is immersed in a first bath containing dissolved ions of a first conductive material for a time sufficient to displacement plate a first barrier layer on the conductive line. The first barrier layer is then immersed in an electroless plating bath to form a flux concentrating layer on the first barrier layer. The flux concentrating layer is immersed in a second bath containing dissolved ions of a second conductive material for a time sufficient to displacement plate a second barrier layer on the flux concentrating layer.