Inventors:
- Santa Clara CA, US
Ankit VORA - Bothell WA, US
Boyi FU - San Jose CA, US
Venkat HARIHARAN - Lehi UT, US
Mayu YAMAMURA - San Mateo CA, US
Mario CORNEJO - San Jose CA, US
Igor ABRAMSON - Cupertino CA, US
Mo YANG - Sunnyvale CA, US
Daniel REDFIELD - Morgan Hill CA, US
Rajeev BAJAJ - Fremont CA, US
Nag B. PATIBANDLA - Pleasanton CA, US
International Classification:
B24B 37/24
C08F 283/00
B33Y 10/00
B33Y 70/00
B29C 64/112
Abstract:
Methods and formulations for manufacturing polishing articles used in polishing processes are provided. In one implementation, a UV curable resin precursor composition is provided. The UV curable resin precursor comprises a precursor formulation. The precursor formulation comprises a first resin precursor component that comprises a semi-crystalline radiation curable oligomeric material, wherein the semi-crystalline radiation curable oligomeric material is selected from a semi-crystalline aliphatic polyester urethane acrylate, a semi-crystalline aliphatic polycarbonate urethane acrylate, a semi-crystalline aliphatic polyether urethane acrylate, or combinations thereof. The precursor formulation further comprises a second resin precursor component that comprises a monofunctional or multifunctional acrylate monomer. The resin precursor formulation further comprises a photoinitiator, wherein the precursor formulation has a viscosity that enables the precursor formulation to be dispensed to form a portion of a polishing article by an additive manufacturing process.