Inventors:
Hisatomo Ohno - Tokyo, JP
Toshihiro Izumi - Tokyo, JP
Mitsuru Saito - Tokyo, JP
Takuya Nagamine - Tokyo, JP
Claughton Miller - Hayward CA, US
Ichiro Kodaka - Hayward CA, US
Assignee:
NIHON Microcoating Co., Ltd. - Tokyo
International Classification:
B24D 11/00
Abstract:
A transparent pad having a polishing surface with an average surface roughness of 5 μm or less is used as a polishing pad. An indentation is formed on the back surface of the transparent pad such that its rate of light transmission is locally changed. The transparent pad has a rate of light transmission equal to or greater than 10% or preferably 30% for light of at least one wavelength in the range of 350 nm–900 nm.