Inventors:
Husam Gaffur - San Jose CA
Sukyoon Yoon - Sunnyvale CA
Assignee:
National Semiconductor Corporation - Santa Clara CA
International Classification:
H01L 2976
H01L 21265
Abstract:
A low-voltage 0. 8-micron CMOS process is modified by implanting arsenic or phosphorus during epitaxy in a p-type substrate starting material to increase the depth of selected n-well areas for the purpose of producing high-voltage transistors on the same substrate in the same CMOS process. Implanting boron in a p-field extension area in a manner which minimizes the dopant in the adjacent field oxide achieves a similar result. That is, breakdown and punch-through voltages are increased. Together, these make CMOS transistors which operate at a higher voltage range than either innovation alone.