Inventors:
Hsingjen Wann - Carmel NY, US
Ying Zhang - Yorktown Heights NY, US
Robert C. Wong - Poughkeepsie NY, US
An Steegen - Stamford CT, US
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
H01L027/01
H01L027/12
H01L031/0392
H01L029/76
H01L029/94
Abstract:
A SRAM cell fabricated in SSOI (selective silicon on insulator) comprises cross coupled PFET pull-up devices P, Pand NFET pull-down devices N, N, with the P, Pdevices being connected to the power supply and the N, Ndevices being connected to the ground. A first passgate NL is coupled between a first bitline and the junction of the devices Pand N, with its gate coupled to a wordline, and a second passgate NR is coupled between a second bitline and the junction of devices Pand N, with its gate coupled to the wordline. Each of the pull-up devices P, P, the pull-down devices N, N, and the first and second passgates NL, NR are fabricated with selective SOI, with buried oxide being selectively provided under the drains of the pull-up devices Pand P, the drains of the pull-down devices Nand N, and the sources and drains of the passgate devices NL and NR.