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Haojiang Chen

from Cupertino, CA
Age ~64
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Also known as:
Hao Jiang Chen, Hao J Chen, Chen Haojiang, G Chen
Phone and address:
10582 White Fir Ct, Cupertino, CA 95014
Related to:
Xuan J Chen, 39Li Lai, 64
Connected to:
Aiyu Chen, 33Allen C Chen, 73Aluna F Chen, 58Anna D Chen, 67Annamaria E Chen, 38Annice B Chen, 31Anthony Chen, 60Ava H Chen, 42Baofeng Chen, 40Barbara K Chen, 45

Haojiang Chen Phones & Addresses

  • 10582 White Fir Ct, Cupertino, CA 95014
  • Sunnyvale, CA
  • Fort Collins, CO
  • Longmont, CO
  • Santa Clara, CA

Publications

Us Patents

Substrate Cleaning Apparatus And Method

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US Patent:
20020072016, Jun 13, 2002
Filed:
Dec 13, 2000
Appl. No.:
09/737373
Inventors:
Haojiang Chen - Cupertino CA, US
James Papanu - San Rafael CA, US
Mark Kawaguchi - San Jose CA, US
Harald Herchen - Los Altos CA, US
Jeng Hwang - Cupertino CA, US
Guangxiang Jin - San Jose CA, US
David Palagashvili - Mountain View CA, US
Assignee:
Applied Materials, Inc.
International Classification:
G03F007/36
US Classification:
430/323000, 430/322000, 216/058000
Abstract:
A method of processing a substrate comprises exposing the substrate to an energized process gas to etch features on the substrate and exposing the substrate to an energized cleaning gas to remove etchant residue and/or remnant resist from the substrate . To enhance the cleaning process, the substrate may be treated before, during or after the cleaning process by exposing the substrate to an energized treating gas comprising a halogen species.
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Haojiang Chen from Cupertino, CA, age ~64 Get Report