US Patent:
20230023764, Jan 26, 2023
Inventors:
- Santa Clara CA, US
Michael R. RICE - Pleasanton CA, US
Gang Grant PENG - Santa Clara CA, US
Rui CHENG - San Jose CA, US
Zubin HUANG - Santa Clara CA, US
Han WANG - Redwood City CA, US
Karthik JANAKIRAMAN - San Jose CA, US
Diwakar KEDLAYA - Santa Clara CA, US
Paul L. BRILLHART - Pleasanton CA, US
Abdul Aziz KHAJA - San Jose CA, US
International Classification:
H01L 21/285
H01L 21/67
Abstract:
Methods and apparatus for surface profiling and texturing of chamber components for use in a process chamber, such surface-profiled or textured chamber components, and method of use of same are provided herein. In some embodiments, a method includes measuring a parameter of a reference substrate or a heated pedestal using one or more sensors and modifying a surface of a chamber component physically based on the measured parameter.