Goksen G Yaralioglu

6789426, Sep 14, 2004

Jul 17, 2002

10/198290

Goksen G. Yaralioglu - Palo Alto CA
Arif S. Ergun - Mountain View CA
Hemanth Jagannathan - Palo Alto CA
Butrus T. Khuri-Yakub - Palo Alto CA

Board of Trustees of the Leland Stanford Junior University - Stanford CA

G01H 500

73597, 374119

There is described a method and apparatus for measuring temperature of a fluid in a microchannel of the type having spaced walls. An ultrasonic transducer transmits ultrasonic waves transmitted from one wall to the opposite wall. A processor determines the time-of-flight of the ultrasonic waves from the one wall and reflected to the opposite wall to the one wall. The processor converts the time-of-flight to velocity by dividing the distance between walls by the time-of-flight. The processor converts velocity to temperature from the relationship of velocity to temperature in the fluid.

7321181, Jan 22, 2008

Apr 4, 2005

11/098863

Butrus T. Khuri-Yakub - Palo Alto CA, US
Arif S. Ergun - Mountain View CA, US
Goksen Yaralioglu - Mountain View CA, US

The Board of Trustees of the Leland Stanford Junior University - Palo Alto CA

H01L 41/08

310320, 310324, 310334

A capacitive membrane ultrasonic transducer which includes a membrane supported by a substrate in which ultrasonic bulk waves at the frequency of operation of the transducers are suppressed by configuring the substrate and a method of suppressing the ultrasonic bulk waves.

7694552, Apr 13, 2010

Feb 11, 2008

12/069730

Butrus T. Khuri-Yakub - Palo Alto CA, US
Goksen G. Yaralioglu - Mountain View CA, US

The Board of Trustees of the Leland Stanford Junior University - Palo Alto CA

G01N 29/00
G01N 15/06

73 6453, 73 6175, 73 6179

A mechanical resonator capable of providing an intrinsically high mechanical quality factor in immersion is provided. The resonator includes a membrane attached at its perimeter to a frame, such that a front side of the membrane is in contact with the liquid, and the back side of the membrane is not in contact with the liquid or the frame. The membrane can act as a mechanical resonator. The quality factor of this resonator is enhanced by providing a pressure release boundary region on the frame in proximity to the membrane and in contact with the liquid. The pressure release boundary region provides a soft boundary condition, in the sense that a mechanical impedance on the solid side of the solid-liquid interface is less than the liquid mechanical impedance. Providing such a soft boundary condition reduces the mechanical energy loss due to excitation of waves in the liquid, thereby improving resonator quality factor. Such high-Q resonators are particularly useful for sensor applications.

7863698, Jan 4, 2011

Apr 3, 2009

12/418554

Joseph Seeger - Menlo Park CA, US
Goksen G. Yaralioglu - Mountain View CA, US
Bruno Borovic - San Francisco CA, US
Alexander Castro - San Jose CA, US

Invensense, Inc. - Sunnyvale CA

H01L 29/84

257415, 257254, 257E29324

An anchoring assembly for anchoring MEMS device is disclosed. The anchoring assembly comprises: a top substrate; a bottom substrate substantially parallel to the top substrate; and a first portion of the anchor between the top substrate and the bottom substrate. The first portion of the anchor is rigidly connected to the top substrate; and the first portion of the anchor is rigidly connected to the bottom substrate. A second portion of the anchor is between the top substrate and the bottom substrate. The second portion of the anchor is rigidly connected to the top substrate; the second portion of the anchor being an anchoring point for the MEMS device. A substantially flexible mechanical element coupling the first portion of the anchor and the second portion of the anchor; the flexible element providing the electrical connection between the first portion of the anchor and the second portion of the anchor.

7934423, May 3, 2011

Dec 10, 2007

11/953762

Steven S. Nasiri - Saratoga CA, US
Goksen G. Yaralioglu - Mountain View CA, US
Joseph Seeger - Menlo Park CA, US
Babak Taheri - San Francisco CA, US

Invensense, Inc. - Sunnyvale CA

G01P 15/08
G01P 15/125

7351402, 7351432

Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.

8047075, Nov 1, 2011

Jun 21, 2007

11/766776

Steven S. Nasiri - Saratoga CA, US
Joseph Seeger - Menlo Park CA, US
Goksen Yaralioglu - Mountain View CA, US

Invensense, Inc. - Santa Clara CA

G01P 15/125

7351432, 73510

A system and method in accordance with the present invention provides for a low cost, bulk micromachined accelerometer integrated with electronics. The accelerometer can also be integrated with rate sensors that operate in a vacuum environment. The quality factor of the resonances is suppressed by adding dampers. Acceleration sensing in each axis is achieved by separate structures where the motion of the proof mass affects the value of sense capacitors differentially. Two structures are used per axis to enable full bridge measurements to further reduce the mechanical noise, immunity to power supply changes and cross axis coupling. To reduce the sensitivity to packaging and temperature changes, each mechanical structure is anchored to a single anchor pillar bonded to the top cover.

8183944, May 22, 2012

Apr 3, 2009

12/418547

Joseph Seeger - Menlo Park CA, US
Goksen G. Yaralioglu - Mountain View CA, US
Baris Cagdaser - Sunnyvale CA, US

Invensense, Inc. - Sunnyvale CA

H03B 5/30

331154, 331116 M, 331 34, 331177 R

A system and method is disclosed that provides a technique for generating an accurate time base for MEMS sensors and actuators which has a vibrating MEMS structure. The accurate clock is generated from the MEMS oscillations and converted to the usable range by means of a frequency translation circuit.

8508039, Aug 13, 2013

May 8, 2008

12/117264

Steven S. Nasiri - Saratoga CA, US
Goksen G. Yaralioglu - Mountain View CA, US

Invensense, Inc. - Sunnyvale CA

H01L 23/12

257704, 257678, 257783, 257E21499, 438 66, 438106, 438125

In a method and system in accordance with the present invention, solder balls are added on top of vertically integrated MEMS with CMOS by using wafer scale fabrication compatible with existing chip scale packaging capabilities. In the present invention, both the MEMS and the CMOS dies are fabricated in equal dimensions. On the MEMS level, silicon islands are defined by DRIE etching to be bonded on top of CMOS pads. These conducting silicon islands later provide electrical connections between the CMOS pads and the conducting traces that lead to solder balls on top.