Inventors:
Y. Mohammed Kasem - Santa Clara CA
Yueh-Se Ho - Sunnyvale CA
Lee Shawn Luo - San Jose CA
Chang-Sheng Chen - Santa Clara CA
Eddy Tjhia - Sunnyvale CA
Bosco Lan - Fremont CA
Jacek Korec - San Jose CA
Anup Bhalla - Santa Clara CA
Assignee:
Siliconix Incorporated - Santa Clara CA
International Classification:
H01L 2302
Abstract:
In a semiconductor package for a chip having terminals on both sides, for example, a power MOSFET in which the gate and source terminals are on the front side and the drain terminal is on the back side, electrical contact is made with the back side terminal by extending vias, which can take the form of trenches, holes or other cavities, either entirely or patrially through the chip. The vias are filled with a metal or other electrically conductive material. The process is performed on the chips in a wafer simultaneously. The resulting package is compact and economical to manufacture and can readily be mounted, flip-chip style, on a printed circuit board.