Dana R Dereus

6876482, Apr 5, 2005

Nov 8, 2002

10/291107

Dana Richard DeReus - Colorado Springs CO, US

Turnstone Systems, Inc. - Livermore CA
Wispry, Inc. - Cary NC

G02B026/00
H01S057/00
H02N010/00
G01J001/36
H01B013/00

359290, 359291, 359214, 200181, 310307, 310309, 25022722, 2502141, 216 13, 333262, 333101, 356519

MEMS Device Having Contact and Standoff Bumps and Related Methods. According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves.

8059385, Nov 15, 2011

Dec 5, 2007

11/999522

Dana DeReus - Irvine CA, US
Shawn J. Cunningham - Irvine CA, US

Wispry, Inc. - Irvine CA

H01G 5/00
H01G 7/00
H01G 4/005

361277, 361303, 361311, 29 2542

Substrates with slotted metals and related methods are provided. According to one aspect, a slotted metal attached to a substrate can include a metal patterned with slots less than or about equal to 2 microns. The slots can result in line widths that are approximately the size of a single metallurgical grain in an unpatterned layer.

8264054, Sep 11, 2012

Nov 8, 2002

10/291125

Shawn Jay Cunningham - Colorado Springs CO, US
Dana Richard DeReus - Colorado Springs CO, US
Subham Sett - Colorado Springs CO, US
John Richard Gilbert - Brookline MA, US

Wispry, Inc. - Irvine CA

H01L 31/058

257467, 257252, 257414

MEMS Device having Electrothermal Actuation and Release and Method for Fabricating. According to one embodiment, a microscale switch is provided and can include a substrate and a stationary electrode and stationary contact formed on the substrate. The switch can further include a movable microcomponent suspended above the substrate. The microcomponent can include a structural layer including at least one end fixed with respect to the substrate. The microcomponent can further include a movable electrode spaced from the stationary electrode and a movable contact spaced from the stationary electrode. The microcomponent can include an electrothermal component attached to the structural layer and operable to produce heating for generating force for moving the structural layer.

8319312, Nov 27, 2012

Jul 23, 2008

12/178554

Dana DeReus - Irvine CA, US
Shawn J. Cunningham - Irvine CA, US

Wispry, Inc. - Irvine CA

H01L 29/00

257528, 257531, 257532, 257E29432

Methods and devices for fabricating tri-layer beams are provided. In particular, disclosed are methods and structures that can be used for fabricating multilayer structures through the deposition and patterning of at least an insulation layer, a first metal layer, a beam oxide layer, a second metal layer, and an insulation balance layer.

8319393, Nov 27, 2012

Jan 19, 2010

12/689915

Dana Richard DeReus - Irvine CA, US

Wispry, Inc. - Irvine CA

H02N 1/00

310309

Cantilever beam electrostatic actuators are disclosed. A cantilever beam electrostatic actuator in accordance with the present invention comprises an actuator beam having a first width at a support anchor point and a second width at a distal end of the actuator, wherein the first width is narrower than the second width. Another actuator in accordance with the present invention comprises an actuator region, having a first width, a beam, having a second width, coupled between an edge of the actuator region and a pivot point, the beam being approximately centered on the actuator region, wherein the second width is narrower than the first width, and at least one auxiliary actuator flap, coupled to the actuator region, the at least one auxiliary actuator flap coupled to the actuator region along the edge of the actuator region, the at least one auxiliary actuator flap being farther away from a centerline of the actuator than the beam.

8420427, Apr 16, 2013

Jul 25, 2006

11/492671

Shawn Jay Cunningham - Irvine CA, US
Dana Richard DeReus - Irvine CA, US
Subham Sett - Lincoln RI, US
John Gilbert - Brookline MA, US

Wispry, Inc. - Irvine CA

H01L 21/00

438 48, 438510, 257E27112

Methods for Implementation of a Switching Function in a Microscale Device and for Fabrication of a Microscale Switch. According to one embodiment, a method is provided for implementing a switching function in a microscale device. The method can include providing a stationary electrode and a stationary contact formed on a substrate. Further, a movable microcomponent suspended above the substrate can be provided. A voltage can be applied between the between a movable electrode of the microcomponent and the stationary electrode to electrostatically couple the movable electrode with the stationary electrode, whereby the movable component is deflected toward the substrate and a movable contact moves into contact with the stationary contact to permit an electrical signal to pass through the movable and stationary contacts. A current can be applied through the first electrothermal component to produce heating for generating force for moving the microcomponent.

8570705, Oct 29, 2013

Jan 14, 2011

13/007255

Dana DeReus - Santa Ana CA, US

Wispry, Inc. - Irvine CA

H01G 7/00
H01G 7/06

361277, 361280, 361281

The present subject matter relates to MEMS tunable capacitors and methods for operating such capacitors. The tunable capacitor can feature a primary stationary actuator electrode on a substrate, a secondary stationary actuator electrode on the substrate, a stationary RF signal capacitor plate electrode on the substrate, a sprung cantilever disposed over the substrate, a beam anchor connecting a first end of the sprung cantilever to the substrate, and one or more elastic springs or other biasing members connecting a second end of the sprung cantilever to the substrate, the second end being located distally from the first end. The spring cantilever can be movable between an OFF state defined by the potential difference between the stationary and moveable actuator electrodes being zero, and an ON state defined by a non-zero potential difference between the stationary and moveable actuator electrodes.

7361962, Apr 22, 2008

Dec 20, 2005

11/313238

Ted Plowman - Raleigh NC, US
Dana DeReus - Irvine CA, US
Randy Richards - McKinney TX, US
Arthur S. Morris - Raleigh NC, US

Wispry, Inc. - Irvine CA

H01G 5/01

257415, 310311, 361278

Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a MEMS variable capacitor is provided. The variable capacitor can include first and second actuation electrodes being spaced apart, and at least one of the actuation electrodes being movable when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include a first capacitive electrode attached to the first actuation electrode. The variable capacitor can also include a second capacitive electrode attached to the second actuation electrode and spaced from the first capacitive electrode for movement of at least one of the capacitive electrodes with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes. Further, the variable capacitor can include first and second torsional beams for providing resistance to movement of the first and second capacitive electrodes with respect to one another. The torsional beams can include a first and second end.