US Patent:
20120219919, Aug 30, 2012
Inventors:
Muthiah Thiyagarajan - Bridgewater NJ, US
Ralph R. Dammel - Flemington NJ, US
Yi Cao - Bedminster NJ, US
SungEun Hong - Bedminster NJ, US
WenBing Kang - Kakegawa, JP
Clement Anyadiegwu - Parlin NJ, US
International Classification:
G03F 7/26
Abstract:
The present invention relates to an aqueous coating composition for coating a photoresist pattern comprising a polymer containing a lactam group of structure ()where Ris independently selected hydrogen, C-Calkyl, C-Calkyl alcohol, hydroxy (OH), amine (NH), carboxylic acid, and amide (CONH), represents the attachment to the polymer, m=1-6, and n=1-4.The present invention also relates to a process for manufacturing a microelectronic device comprising providing a substrate with a photoresist pattern, coating the photoresist pattern with the novel coating material reacting a portion of the coating material in contact with the photoresist pattern, and removing a portion of the coating material which is not reacted with a removal solution.