Inventors:
Chuan Pu - Foster City CA, US
Yi Tao - San Jose CA, US
Chandra S. Tupelly - San Ramon CA, US
Kostadin D. Djordjev - San Jose CA, US
Fan Zhong - Fremont CA, US
Rihui He - San Jose CA, US
Wenyue Zhang - San Jose CA, US
Assignee:
QUALCOMM MEMS Technologies, Inc. - San Diego CA
International Classification:
G06T 1/00
G06F 3/038
B05D 5/12
H02N 1/00
US Classification:
345501, 310300, 345204, 427123
Abstract:
This disclosure provides systems, methods and apparatus for controlling a mechanical layer. In one aspect, an electromechanical systems device includes a substrate and a mechanical layer positioned over the substrate to define a gap. The mechanical layer is movable in the gap between an actuated position and a relaxed position, and includes a mirror layer, a cap layer, and a dielectric layer disposed between the mirror layer and the cap layer. The mechanical layer is configured to have a curvature in a direction away from the substrate when the mechanical layer is in the relaxed position. In some implementations, the mechanical layer can be formed to have a positive stress gradient directed toward the substrate that can direct the curvature of the mechanical layer upward when the sacrificial layer is removed.