US Patent:
20150240359, Aug 27, 2015
Inventors:
- Almere, NL
Herbert Terhorst - Amersfort, NL
Michael Halpin - Scottsdale AZ, US
Carl White - Gilbert AZ, US
Todd Robert Dunn - Cave Creek AZ, US
Eric Shero - Phoenix AZ, US
Melvin Verbass - Lelystad, NL
Christopher Wuester - Chandler AZ, US
Kyle Fondurulia - Phoenix AZ, US
Assignee:
ASM IP Holding B.V. - Almere
International Classification:
C23C 16/455
H01L 21/02
Abstract:
A gas inlet system for a wafer processing reactor includes a tubular gas manifold conduit adapted to be connected to a gas inlet port of the wafer processing reactor; and gas feeds including a first feed for feeding a first gas into the tubular gas manifold conduit and a second feed for feeding a second gas into the tubular gas manifold conduit. Each feed has two or more injection ports connected to the tubular gas manifold conduit at a first axial position of the tubular gas manifold conduit, and the injection ports of each of the gas feeds are evenly distributed along a circumference of the tubular gas manifold conduit at the first axial position.