US Patent:
20120148744, Jun 14, 2012
Inventors:
Ronald L. Colvin - Gilbert AZ, US
Jeff Mittendorf - Chandler AZ, US
Charles J. Moretti - Scottsdale AZ, US
John W. Rose - Cave Creek AZ, US
Earl Blake Samuels - Scottsdale AZ, US
International Classification:
C23C 16/46
C23C 16/02
Abstract:
A system for processing substrates is described. In one embodiment, the system comprises a process chamber, at least one electrical resistance heater, and at least one Coanda effect gas injector.