Inventors:
Bryon K. Hance - Austin TX, US
Brian D. White - Kyle TX, US
William Brennan - Austin TX, US
Joseph W. Wiseman - Austin TX, US
Allen Evans - Dripping Springs TX, US
Assignee:
Spansion LLC - Sunnyvale CA
International Classification:
H01L 29/792
H01L 23/48
H01L 23/52
H01L 29/40
US Classification:
257324, 257325, 257326, 257758, 257E23011, 257E23141, 257E23145
Abstract:
Devices and systems for insulating integrated circuits from ultraviolet (“UV”) light are described. The device includes a conductive feature, a first and second UV blocking layer, a first and second insulating laver, and a conductive structure. The first insulating layer overlays the first UV blocking layer. A via opening extends through the first insulating layer and the first UV blocking layer. The second UV blocking layer overlays the first insulating laver. The second insulating layer overlays the second UV blocking layer. An interconnect trench is defined in the second insulating layer and second UV blocking layer. The conductive structure is electrically connected to the conductive feature and extends into the via opening and along the interconnect trench.
