Gary Yama - Mountain View CA, US Beth Pruitt - San Francisco CA, US Arnoldus Alvin Barlian - Palo Alto CA, US
Assignee:
Robert Bosch GmbH - Stuttgart
International Classification:
H01L 21/00
US Classification:
438 52, 438 50
Abstract:
A method of forming a device with a piezoresistor is disclosed herein. In one embodiment, the method includes providing a substrate, etching a trench in the substrate to form a vertical wall, growing a piezoresistor layer epitaxially on the vertical wall, and separating the vertical wall from an underlying layer of the substrate that extends along a horizontal plane such that the piezoresistor layer is movable with respect to the underlying layer within the horizontal plane.
Kristina L. Lamers - Fort Collins CO, US Patrick Chiang - Sacramento CA, US Roger Flynn - Mountain View CA, US Yang-ren Rau - Hsinchu, TW Beth L. Pruitt - San Francisco CA, US Aikaterina Ioakeimidi - San Francisco CA, US
Assignee:
Avago Technologies Wireless IP (Singapore) Pte. Ltd. - Singapore
International Classification:
A01G 13/06
US Classification:
392386, 392394
Abstract:
An electrically actuated liquid dispenser, an electrically addressable liquid dispenser and an electronic device are described.
Disclosed are improved micro-electrochemical sensor structures that uses cyclic voltammetry (CV) to perform electrochemical measurements on gaseous volatile organic compounds (VOC). The improved sensor structures include a Ag reference electrode layer and an adhesion SU-8 layer. Operationally, the oxidation of the Ag layer provides a reference potential that is used to determine the redox reactions occurring on the surface of Pt electrodes exposed to a flow of gaseous VOC. Experimentally, our improved sensor was used to detect methane dissolved in N2. The results show clear and reproducible oxidation signals that were attributed to the presence of methane in the gas flow. The position of this signal for methane was compared to CO, and was found to be clearly separated from it, proving the speciation capabilities of the sensor. In addition, our experiments showed that it is possible to use the current value to quantify the detected molecule in the gas flow.
