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Anant Chimmalgi

from Los Altos, CA
Age ~45
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Also known as:
Anant Chimmagli, Anant I
Phone and address:
800 S El Monte Ave, Los Altos, CA 94022
Related to:
Vijaya ChimmalgiPralhad B Chimmalgi, 82
Connected to:
Ada A Chin, 95Alex Chin, 45Amber Chin, 37Amy R Chin, 55Angelina S Chin, 73Annmarie E Chin, 62Arline C Chin, 70Bay L Chin, 49Benito L Chin, 38Boyd G Chin, 50

Anant Chimmalgi Phones & Addresses

  • 800 S El Monte Ave, Los Altos, CA 94022
  • San Jose, CA
  • Fremont, CA
  • 2437 Warring St, Berkeley, CA 94704 (510) 204-9821
  • 2437 Warring St #A, Berkeley, CA 94704 (510) 204-9821
  • Sunnyvale, CA
  • 2939 Winwood Way, San Jose, CA 95148

Work

Company: Kla-tencor Sep 2011 Position: Systems design manager

Education

School / High School: University of California, Berkeley 2001 to 2005

Skills

Semiconductors • Optics • Engineering Management • Engineering • Design of Experiments • Product Development • R&D • Simulations • Semiconductor Industry • Metrology • Failure Analysis • Manufacturing • Matlab • Thin Films • Systems Engineering • Systems Design • Cross Functional Team Leadership • System Design • Electronics • Labview • Nanotechnology • Program Management • Testing • C • Sensors • Management • Laser • System Architecture • Physics • Heat Transfer • Scheduling • Team Management • Product Management • Laser Physics • Plasma Physics • Semiconductor Equipment • Project Planning • Project Implementation • Characterization • Spectroscopy • Zemax • Microscopy • Scanning Probe Microscopy • Nanofabrication • Thermal Engineering • Project Engineering • Optomechanics • Vendor Management • Optoelectronics • Spc

Languages

English • Hindi • Kannada • German

Industries

Semiconductors

Resumes

Resumes

Anant Chimmalgi Photo 1

Director, Optics Engineering

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Location:
800 south El Monte Ave, Los Altos, CA 94022
Industry:
Semiconductors
Work:
KLA-Tencor since Sep 2011
Systems Design Manager
KLA-Tencor Mar 2006 - Sep 2011
System Design Engineer
University of California Berkeley Aug 2001 - Dec 2005
Graduate Student Researcher
Education:
University of California, Berkeley 2001 - 2005
University of California, Berkeley 2001 - 2003
National Institute of Technology Karnataka 1997 - 2001
Skills:
Semiconductors
Optics
Engineering Management
Engineering
Design of Experiments
Product Development
R&D
Simulations
Semiconductor Industry
Metrology
Failure Analysis
Manufacturing
Matlab
Thin Films
Systems Engineering
Systems Design
Cross Functional Team Leadership
System Design
Electronics
Labview
Nanotechnology
Program Management
Testing
C
Sensors
Management
Laser
System Architecture
Physics
Heat Transfer
Scheduling
Team Management
Product Management
Laser Physics
Plasma Physics
Semiconductor Equipment
Project Planning
Project Implementation
Characterization
Spectroscopy
Zemax
Microscopy
Scanning Probe Microscopy
Nanofabrication
Thermal Engineering
Project Engineering
Optomechanics
Vendor Management
Optoelectronics
Spc
Languages:
English
Hindi
Kannada
German

Publications

Us Patents

Method And Apparatus To Reduce Thermal Stress By Regulation And Control Of Lamp Operating Temperatures

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US Patent:
20140060792, Mar 6, 2014
Filed:
Aug 26, 2013
Appl. No.:
13/975945
Inventors:
Anant Chimmalgi - San Jose CA, US
Rajeev Patil - Fremont CA, US
Erik Kim - Sunnyvale CA, US
Rudolf Brunner - Mountain View CA, US
Quang Giang - San Francisco CA, US
Lauren Wilson - San Jose CA, US
Ken Gross - San Carlos CA, US
Ilya Bezel - Sunnyvale CA, US
Dan Scott - San Jose CA, US
Younus Vora - San Jose CA, US
Matthew Derstine - Los Gatos CA, US
Cedric Lasfargues - Castro Valley CA, US
Assignee:
KLA-Tencor Corporation - Milpitas CA
International Classification:
F28C 3/04
US Classification:
165185
Abstract:
A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

Plasma Cell For Providing Vuv Filtering In A Laser-Sustained Plasma Light Source

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US Patent:
20130181595, Jul 18, 2013
Filed:
Jan 15, 2013
Appl. No.:
13/741566
Inventors:
Anatoly Shchemelinin - Pleasanton CA, US
Eugene Shifrin - Sunnyvale CA, US
Matthew Panzer - San Jose CA, US
Matthew Derstine - Los Gatos CA, US
Jincheng Wang - San Jose CA, US
Anant Chimmalgi - San Jose CA, US
Rajeev Patil - Fremont CA, US
Rudolf Brunner - Mountain View CA, US
Assignee:
KLA-TENCOR CORPORATION - Milpitas CA
International Classification:
F21V 9/06
US Classification:
313112
Abstract:
A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma, the plasma bulb being substantially transparent to light emanating from a pump laser configured to sustain the plasma within the plasma bulb, wherein the plasma bulb is substantially transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma, and a filter layer disposed on an interior surface of the plasma bulb, the filter layer configured to block a selected spectral region of the illumination emitted by the plasma.

Resin Cassettes

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US Patent:
20210141313, May 13, 2021
Filed:
Oct 19, 2020
Appl. No.:
17/073654
Inventors:
- Redwood City CA, US
Sean Patrick Wheeler - San Jose CA, US
Anant Chimmalgi - Los Altos CA, US
International Classification:
G03F 7/20
B29C 64/106
G03F 7/00
Abstract:
A cassette includes a light transmissive window through which a temporally and spatially modulated image is passed. The window has a bottom surface, as part of the cassette, or as a separate component which may be separately interchangeable in the apparatus, or a part of the apparatus. In some embodiments: (i) the window bottom surface comprises a convex surface or consists essentially of a convex surface (e.g., without additional optical structure associated therewith); (ii) the window bottom surface comprises a concave surface or consists essentially of a concave surface (e.g., without additional optical structure associated therewith); (iii) the window bottom surface has a diffraction grating or Fresnel lens thereon or operatively associated therewith; (iv) a combination of (i) and (iii); or (v) a combination of (ii) and (iii).

Broadband Light Source Including Transparent Portion With High Hydroxide Content

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US Patent:
20180330937, Nov 15, 2018
Filed:
Jul 23, 2018
Appl. No.:
16/042887
Inventors:
- Milpitas CA, US
Anant Chimmalgi - San Jose CA, US
Matthew Panzer - San Jose CA, US
Ilya Bezel - Mountain View CA, US
International Classification:
H01J 61/30
H01J 61/02
H01J 65/04
H05G 2/00
Abstract:
A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.

Additive Manufacturing With High Intensity Light

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US Patent:
20180215093, Aug 2, 2018
Filed:
Jan 30, 2018
Appl. No.:
15/883392
Inventors:
- Redwood City CA, US
Anant Chimmalgi - Los Altos CA, US
International Classification:
B29C 64/135
B33Y 10/00
B33Y 30/00
F21K 9/64
G03F 7/20
Abstract:
In a method of making a three dimensional object from a polymerizable liquid by stereolithography including irradiating the liquid with light projected from a light source through or across a patterning array and through an optically transparent build plate to the polymerizable liquid, as improvement includes employing as the light source (i) at least one or a plurality of laser diode array(s) or (ii) a light-sustained plasma.

Plasma Cell For Providing Vuv Filtering In A Laser-Sustained Plasma Light Source

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US Patent:
20180172240, Jun 21, 2018
Filed:
Feb 13, 2018
Appl. No.:
15/895868
Inventors:
- Milpitas CA, US
Anatoly Shchemelinin - Bozeman MT, US
Eugene Shifrin - Sunnyvale CA, US
Matthew Panzer - San Jose CA, US
Matthew Derstine - Los Gatos CA, US
Jincheng Wang - San Jose CA, US
Anant Chimmalgi - San Jose CA, US
Rajeev Patil - Fremont CA, US
Rudolf Brunner - Mountain View CA, US
International Classification:
F21V 9/06
H01J 61/52
H01J 61/40
H01J 61/35
H01J 61/34
H01J 61/16
H01J 61/14
H01J 61/12
H01J 65/04
H01J 61/20
Abstract:
A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.

System And Method For Inhibiting Vuv Radiative Emission Of A Laser-Sustained Plasma Source

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US Patent:
20170345639, Nov 30, 2017
Filed:
Jul 29, 2016
Appl. No.:
15/223335
Inventors:
- Milpitas CA, US
Kenneth P. Gross - San Carlos CA, US
Lauren Wilson - San Jose CA, US
Rahul Yadav - Sunnyvale CA, US
Joshua Wittenberg - Fremont CA, US
Aizaz Bhuiyan - Milpitas CA, US
Anatoly Shchemelinin - Bozeman MT, US
Anant Chimmalgi - San Jose CA, US
Richard Solarz - Danville CA, US
International Classification:
H01J 61/12
H01J 61/36
H01J 61/02
Abstract:
A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source into the volume of the gas mixture in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas containment element may be configured to contain a volume of a gas mixture including a first gas component and a second gas component. The second gas component suppresses at least one of a portion of the broadband radiation associated with the first gas component or radiation by one or more excimers associated with the first gas component from a spectrum of radiation exiting the gas mixture.

Laser Sustained Plasma Light Source With Graded Absorption Features

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US Patent:
20170164457, Jun 8, 2017
Filed:
Nov 23, 2016
Appl. No.:
15/360397
Inventors:
- Milpitas CA, US
Anatoly Shchemelinin - Bozeman MT, US
Kenneth P. Gross - San Carlos CA, US
Matthew Panzer - San Jose CA, US
Anant Chimmalgi - San Jose CA, US
Lauren Wilson - San Jose CA, US
Joshua Wittenberg - Fremont CA, US
International Classification:
H05G 2/00
H01J 61/02
H01J 61/52
H01J 65/04
H01J 61/30
Abstract:
A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.
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Anant Chimmalgi from Los Altos, CA, age ~45 Get Report