Inventors:
Jon Cardenas - Austin TX
Alexander P. Plevich - Austin TX
Timothy C. Kinsey - Austin TX
Assignee:
Advanced Micro Devices, Inc. - Sunnyvale CA
International Classification:
B24B 719
B24B 730
Abstract:
A slurry distribution system for distributing slurry to a polishing machine that polishes a semiconductor wafer is disclosed. The slurry distribution system includes a storage tank for storing the slurry, a mixing device for mixing the slurry in the storage tank, a distribution loop with an inlet and outlet in fluid communication with the storage tank, a valve in fluid communication with the distribution loop for dispensing the slurry to the polishing machine, and a pump for circulating the slurry from the storage tank through the distribution loop and into the storage tank regardless of whether the slurry is dispensed to the polishing machine. In this manner, the slurry is agitated and efficiently used during polishing and during intervals between polishing.