US Patent:
20220252974, Aug 11, 2022
Inventors:
- Veldhoven, NL
Aage BENDIKSEN - Fairfield CT, US
Derk Servatius Gertruda BROUNS - Herentals, BE
Pradeep K. GOVIL - Norwalk CT, US
Paul JANSSEN - Eindhoven, NL
Maxim Aleksandrovich NASALEVICH - Eindhoven, NL
Arnoud Willem NOTENBOOM - Rosmalen, NL
Mária PÉTER - Eindhoven, NL
Marcus Adrianus VAN DE KERKHOF - Helmond, NL
Willem Joan VAN DER ZANDE - Bussum, NL
Pieter-Jan VAN ZWOL - Eindhoven, NL
Johannes Petrus Martinus Bernardus VERMEULEN - Leende, NL
Willlem-Pieter VOORTHUIJZEN - s-Hertogenbosch, NL
James Norman WILEY - Menlo Park CA, US
International Classification:
G03F 1/64
G03F 1/22
G03F 7/20
G03F 1/62
Abstract:
A pellicle suitable for use with a patterning device for a lithographic apparatus. The pellicle comprising at least one breakage region which is configured to preferentially break, during normal use in a lithographic apparatus, prior to breakage of remaining regions of the pellicle. At least one breakage region comprises a region of the pellicle which has a reduced thickness when compared to surrounding regions of the pellicle.