US Patent:
20040188602, Sep 30, 2004
Inventors:
Diane Chinn - Pleasanton CA, US
Christopher Stolz - Lathrop CA, US
Zhouling Wu - Pleasanton CA, US
Robert Huber - Discovery Bay CA, US
Carolyn Weinzapfel - Tracy CA, US
Assignee:
The Regents of the University of California
International Classification:
H01J003/14
H01J005/16
Abstract:
Photothermal Imaging Scanning Microscopy produces a rapid, thermal-based, non-destructive characterization apparatus. Also, a photothermal characterization method of surface and subsurface features includes micron and nanoscale spatial resolution of meter-sized optical materials.