Inventors:
Yukio Narukawa - Anan, JP
Isamu Niki - Anan, JP
Axel Scherer - Pasadena CA, US
Koichi Okamoto - Pasadena CA, US
Yoichi Kawakami - Kusatsu-shi, Shiga 525-0029, JP
Mitsuru Funato - Kyoto-shi, Kyoto 615-8084, JP
Shigeo Fujita - Kyoto-shi, Kyoto 612-0854, JP
Assignee:
Nichia Corporation - Tokushima
California Institute of Technology - Pasadena CA
International Classification:
H01L 21/15
US Classification:
257 79, 257 94, 257103, 257E31058
Abstract:
The invention provides a nitride semiconductor light-emitting device comprising gallium nitride semiconductor layers formed on a heterogeneous substrate, wherein light emissions having different light emission wavelengths or different colors are given out of the same active layer. Recesses are formed by etching in the first electrically conductive (n) type semiconductor layer formed on a substrate with a buffer layer interposed between them. Each recess is exposed in plane orientations different from that of the major C plane. For instance, the plane orientation of the A plane is exposed. An active layer is grown and joined on the plane of this plane orientation, on the bottom of the recess and the C-plane upper surface of a non-recess portion. The second electrically conductive (p) type semiconductor layer is formed on the inner surface of the recess. With the active layer formed contiguously to the semiconductor layer in two or more plane orientations, a growth rate difference gives rise to a difference in the thickness across the quantum well (active layer), giving out light emissions having different light emission wavelength peaks or different colors.