David F Barker

6568552, May 27, 2003

Aug 30, 2000

09/651512

Farzad Tabrizi - Danville CA
Barry Kitazumi - Milpitas CA
David A. Barker - Walnut Creek CA
David A. Setton - Alameda CA
Leszek Niewmierzycki - San Jose CA
Michael J. Kuhlman - Fremont CA

Mattson Technology, Inc. - Fremont CA

B65D 4102

220260, 220315, 2203451, 2203452, 2203455

A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are unloaded from the other load lock at the pressure of the surrounding environment. The transport chamber has a transport robot with two arms. Processed workpieces and new workpieces may be exchanged by a simple under/over motion of the two robot arms. The transport robot rotates about a central shaft to align with the load locks or the process chamber. The robot may also be raised or lowered to align the arms with the desired location to which workpieces are deposited or from which workpieces are retrieved. The two load locks may be positioned one above the other such that a simple vertical motion of the robot can be used to select between the two load locks. The two load locks and transport robot allow almost continuous processing.

6647665, Nov 18, 2003

Aug 30, 2000

09/651453

Farzad Tabrizi - Danville CA
Barry Kitazumi - Milpitas CA
David A. Barker - Walnut Creek CA
David A. Setton - Alameda CA
Leszek Niewmierzycki - San Jose CA
Michael J. Kuhlman - Fremont CA

Mattson Technology, Inc. - Fremont CA

E05F 1124

49340

A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are unloaded from the other load lock at the pressure of the surrounding environment. The transport chamber has a transport robot with two arms. Processed workpieces and new workpieces may be exchanged by a simple under/over motion of the two robot arms. The transport robot rotates about a central shaft to align with the load locks or the process chamber. The robot may also be raised or lowered to align the arms with the desired location to which workpieces are deposited or from which workpieces are retrieved. The two load locks may be positioned one above the other such that a simple vertical motion of the robot can be used to select between the two load locks. The two load locks and transport robot allow almost continuous processing.

7976263, Jul 12, 2011

Sep 22, 2007

11/859752

David Barker - Walnut Creek CA, US
Robert T. LoBianco - Sunnyvale CA, US
Sai Mantripragada - Fremont CA, US
Farzad Tabrizi - Reno NV, US

B25J 15/10
F26B 3/08

41441611, 414431, 414422

An integrated high speed robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly typically comprises an end effector for moving the object in and out of a chamber, a rotation chuck incorporated on the robot body to provide centering and theta alignment capability, and an optional identification subsystem for identifying the object during transport. The present invention also discloses a transfer robot system, employing a plurality of integrated robot assemblies; a transfer system where a transfer robot system can service a plurality of connected chambers such as FOUP or FOSB; a front end module (FEM); or a sorter system. Through the use of these incorporated capabilities into the moving robot, single object transfer operations can exceed 500 parts per hour.

8233696, Jul 31, 2012

Sep 22, 2007

11/859754

David Barker - Walnut Creek CA, US

Dynamic Micro System Semiconductor Equipment GmbH - Radofzell

G06K 9/00

382145, 382141, 382151, 382312

The present invention discloses apparatuses and methods for simultaneous viewing and reading top and bottom images from a workpiece. The present ID reader can comprise an enclosure covering a top and bottom section of the workpiece with optical elements to guide the light from the workpiece images to a camera. The optical element can be disposed to receive images from a high angle with respect to the surface of the workpiece. The present ID reader can further comprise a light source assembly to illuminate the image. The light source assembly can utilize a coaxial light path with the images, preferably for bright field illumination. The light source assembly can also utilize a non-coaxial light path, preferably for dark field illumination. In an embodiment, the simultaneous images reaching the camera are separate into two distinct images on two different sections of the camera. In another embodiment, the simultaneous images reaching the camera are superimposed into one image on the camera.

20040091349, May 13, 2004

Nov 5, 2003

10/702998

Farzad Tabrizi - Danville CA, US
Barry Kitazumi - Milpitas CA, US
David Barker - Walnut Creek CA, US
David Setton - Alameda CA, US
Leszek Niewmierzycki - San Jose CA, US
Michael Kuhlman - Fremont CA, US

B66C017/08

414/804000, 414/806000

A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are unloaded from the other load lock at the pressure of the surrounding environment. The transport chamber has a transport robot with two arms. Processed workpieces and new workpieces may be exchanged by a simple under/over motion of the two robot arms. The transport robot rotates about a central shaft to align with the load locks or the process chamber. The robot may also be raised or lowered to align the arms with the desired location to which workpieces are deposited or from which workpieces are retrieved. The two load locks may be positioned one above the other such that a simple vertical motion of the robot can be used to select between the two load locks. The two load locks and transport robot allow almost continuous processing. Additional process chambers may be added to the transport chamber to further increase throughput. Each stage of the workpiece handling system may also be designed to handle multiple workpieces, such as two side by side workpieces. Throughput is increased while allowing shared machinery to be used. Linear and rotational doors may be used for the load locks to provide a simple, compact design.

20090255362, Oct 15, 2009

Apr 15, 2008

12/103505

David Barker - Walnut Creek CA, US
Robert T. LoBianco - Sunnyvale CA, US
Bhavesh Amin - Livermore CA, US

Dynamic Micro Systems, Semiconductor Equipment GmbH - Radolfzell

B25J 18/00

7449001, 901 23

A robot with improved cleanliness for use in a clean environment is disclosed, having a uniform flow through the open interface between the clean environment and the interior of the robot housing, passing the particle generation area to an exhaust port, keeping the particles from the clean environment. The uniform flow reduces or eliminates the back flow, and further allows the scalability of the open interface to prevent particles generated from moving mechanisms within the robot housing to contaminate the clean environment. The uniform flow can be established by designing the flow dynamic, centering the exhaust port, or by restricting the flow along the elongated slot, for example, by uniformly restricting the flow along the elongated slot, or by implementing a restrictor along the elongated slot.

20130021465, Jan 24, 2013

Jul 25, 2012

13/557223

David Barker - Walnut Creek CA, US

Dynamic Micro Systems, Semiconductor Equipment GmbH - Radolfzell

H04N 7/18

348 87, 348E07085

The present invention discloses apparatuses and methods for simultaneous viewing and reading top and bottom images from a workpiece. The present ID reader can comprise an enclosure covering a top and bottom section of the workpiece with optical elements to guide the light from the workpiece images to a camera. The optical element can be disposed to receive images from a high angle with respect to the surface of the workpiece. The present ID reader can further comprise a light source assembly to illuminate the image. The light source assembly can utilize a coaxial light path with the images, preferably for bright field illumination. The light source assembly can also utilize a non-coaxial light path, preferably for dark field illumination.

53471393, Sep 13, 1994

Jan 12, 1993

8/004229

David L. Barker - Foster City CA
Richard F. Johnston - Murphys CA
Siobhan C. Pickett - Palo Alto CA

Molecular Dynamics - Sunnyvale CA

G03G 516
G01J 504

250583

Using storage phosphor recording media, two exposures are made of a sample containing two target substances tagged with different radiative emitters, for example 32-P and 35-S. The first exposure, image 1, is of the sample directly on the phosphor screen. The second exposure, image 2, is made with the appropriate absorption material between the sample and screen. Both images are captured. By using simultaneous equations isotope contributions of each label can be determined. Quantitative assessment of the contributions of the isotopes, and hence the target substances, are made by calculating isotope efficiencies both with and without the absorption filter.